Inhibition of Silane Ignition by Iodine Containing Additives.
Inhibition of Silane Ignition by Iodine Containing
Babushok, V. I.; Tsang, W.
NISTIR 6242; October 1998.
National Institute of Standards and Technology. Annual
Conference on Fire Research: Book of Abstracts.
November 2-5, 1998, Gaithersburg, MD, Beall, K. A.,
Editor(s), 125-126 pp, 1998.
Available from: National Technical Information Service
Order number: PB99-102519
fire research; fire science; fire suppression;
additives; silanes; iodine
Silane is widely used in CVD processing in the
semiconductor industry. The highly explosive nature of
SiH4-O2 mixtures represents a serious safety problem.
In this paper we report the results of numerical studies
on the influence of iodine and hydrogen iodide additives
on silane self-ignition limits. Previous studies of
influence of different additives on silane combustion