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Inhibition of Silane Ignition by Iodine Containing Additives.

pdf icon Inhibition of Silane Ignition by Iodine Containing Additives. (222 K)
Babushok, V. I.; Tsang, W.

NISTIR 6242; October 1998.

National Institute of Standards and Technology. Annual Conference on Fire Research: Book of Abstracts. November 2-5, 1998, Gaithersburg, MD, Beall, K. A., Editor(s), 125-126 pp, 1998.

Available from:

National Technical Information Service
Order number: PB99-102519


fire research; fire science; fire suppression; additives; silanes; iodine


Silane is widely used in CVD processing in the semiconductor industry. The highly explosive nature of SiH4-O2 mixtures represents a serious safety problem. In this paper we report the results of numerical studies on the influence of iodine and hydrogen iodide additives on silane self-ignition limits. Previous studies of influence of different additives on silane combustion are summarized.