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Low Cost Digital Vibration Meter.

pdf icon Low Cost Digital Vibration Meter. (2829 K)
Payne, W. V.; Geist, J.

Journal of Research of the National Institute of Standards and Technology, Vol. 112, No. 2, 115-128, March/April 2007.


measuring instruments; costs; vibration; electric potential; signals


This report describes the development of a low cost, digital Micro Electro Mechanical System (MEMS) vibration meter that reports an approximation to the RMS acceleration of the vibration to which the vibration meter is subjected. The major mechanical element of this vibration meter is a cantilever beam, which is on the order of 500 mm in length, with a piezoresistor deposited at its base. Vibration of the device in the plane perpendicular to the cantilever beam causes it to bend, which produces a measurable change in the resistance of a piezoresistor. These changes in resistance along with a unique signal-processing scheme are used to determine an approximation to the RMS acceleration sensed by the device.