Low Cost Digital Vibration Meter.
Low Cost Digital Vibration Meter.
(2829 K)
Payne, W. V.; Geist, J.
Journal of Research of the National Institute of
Standards and Technology, Vol. 112, No. 2, 115-128,
March/April 2007.
Keywords:
measuring instruments; costs; vibration; electric
potential; signals
Abstract:
This report describes the development of a low cost,
digital Micro Electro Mechanical System (MEMS) vibration
meter that reports an approximation to the RMS
acceleration of the vibration to which the vibration
meter is subjected. The major mechanical element of this
vibration meter is a cantilever beam, which is on the
order of 500 mm in length, with a piezoresistor
deposited at its base. Vibration of the device in the
plane perpendicular to the cantilever beam causes it to
bend, which produces a measurable change in the
resistance of a piezoresistor. These changes in
resistance along with a unique signal-processing scheme
are used to determine an approximation to the RMS
acceleration sensed by the device.
