Microfabricated Flow Controller for Refrigerant Expansion.
Microfabricated Flow Controller for Refrigerant
Expansion.
(501 K)
Yashar, D.; Domanski, P. A.; DeVoe, D. L.
Journal of Microelectromechanical Systems, Vol. 16, No.
5, 1106-1112, October 2007.
Keywords:
refrigerants; valves; expansion; devices; compressed
air; computational fluid dynamis; compressing; tests;
mass flow; flow rate
Building and Fire Research Laboratory
National Institute of Standards and Technology
Gaithersburg, MD 20899