BFRL Publications - wafer scanner
wafer scanner
- Selection of Calibration Particles for Scanning Surface Inspection Systems.
Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays. International Society for Optical Engineering (SPIE). Proceedings. Volume 2862. August 8-9, 1996, Denver, CO, Society of Photo-Optical Instrument Engineers, WA, 104-118 pp, 1996.
Mulholland, G. W.; Bryner, N. P.; Liggett, W.; Scheer, B. W.; Goodall, R. K.
Building and Fire Research Laboratory
National Institute of Standards and Technology
Gaithersburg, MD 20899